Vacuum Gate Valve

Purpose of Vacuum Gate Valve

  • Extension of PUMP MTBF (Lifetime) and Reduction of PM maintenace cost
  • Isolation from Process chamber to Vacuum Pump
  • Installed on Vacuum pump inlet
  • Prevent Pump Failure due to overload & restarting - No need to stop the Pump when P.M. on main tool or foreline
  • Reduction of Main tool down time - Maintain vacuum level and cleanliness in the foreline; Isolation from pump to process chamber when the pump trips

Valve Types

Protection Valve


Features:
  • Particle Protection - Extension of MTBF
  • Same as Normal Auto GV Funtion
Field Installation:
  • Samsung LCD : T7-T8 (8th)
  • LG-LCD : P6 (6th)
  • Samsung semi’ : 300mm FAB
  • Hynix semi’ : 300mm FAB
  • Hynix ST semi : 300mm FAB

Auto Valve (Normal)


Features:
  • Pneumatic operation
  • Easy operation on Pump & Tool side
  • Automatic operation by signal interface
  • Remote control on Main Tool side
Field Installation:
  • Samsung LCD : T7 (7th)
  • LG-LCD : P6 (6th)
  • BOE : B3 (6th)
  • Samsung semi’ : 300mm
  • Hynix semi’ : 300mm
  • Hynix ST semi : 300mm

Manual GV


Features:
  • Manual operation
  • Inconvenient operation due to manually
  • Only local control
Field Installation:
  • Samsung semi’ : 200mm & 300mm
  • Hynix semi’ : 300mm

Contact Gosemi

Office Location

1300 E Braker Ln.
Austin, TX 78753

Phone

(512) 953-5655

Fax

1 (844) 273-3098

Email

info@gosemieng.com